Synthesis of the optimal algorithm and structure of contactless optical device for estimating the parameters of statistically uneven surfaces

The production of parts and (or) finished products in electronics, mechanical engineering and other industries is inextricably linked with the control of the accuracy and cleanliness of the processed surfaces. Currently existing meters of parameters of statistically uneven surfaces, both contact and non-contact have some disadvantages, as well as limitations due to methods and design features of measurement. Speckle interferometric methods for measuring parameters of statistically uneven surfaces make it possible to get away from some disadvantages inherent in existing methods and measurements. The use of methods of statistical radio engineering, methods of optimization of statistical solutions and estimates of parameters of predictive distributions for optimal radio engineering system synthesis is promising for the analysis and processing optical-electronic coherent laser space-time signals (speckle images) form with the laser radiation scattered by statistically uneven surfaces. This work synthesizes the optimal algorithm and structure for analyzing the parameters of statistically-temporal surfaces based on spatio-temporal processing of optical speckle interference signals and images using modern methods of optimal synthesis of radio engineering and coherent optoelectronic systems. In this work, an algorithm for processing optical signals scattered by statistically uneven surfaces is synthesized and investigated for problems of optimal estimation of parameters and statistical characteristics of statistically uneven surfaces. A block diagram of the optical contactless device for evaluating the parameters of statistically uneven surfaces is proposed. The limiting errors of estimation parameters of statistically uneven surfaces and the optimal installation angles of the emitters and the optical receiver are investigated. Equations are obtained for estimating the root-mean-square height of the ridges and the correlation radius of small-scale statistically uneven surfaces in the approximation of small perturbations. The proposed method for evaluating the parameters of statistically uneven surfaces allows to increase the accuracy of measurements, to conduct a non-contact assessment of the parameters - even statistically uneven surfaces that have geometric surface irregularities or located in hard-to-reach places, for example, grooves, holes, as well as products of cylindrical, spherical and other shapes.